Plathinium 2019 - Antibes
PLATHINIUM aims to be an important biennial meeting covering low-temperature plasma physics, plasma processing and plasma applications. Plasmas from low to atmospheric pressure and plasmas in magnetic fields are included. Consequently, the range of applications is equally wide and covers traditional fields such as thin films and coatings in microelectronics, automotive, aeronautics industries, and expands to emerging fields such as plasmas, thin films and nanostructures used in environmental, energy, biomedical and agricultural applications.
Reactive HiPIMS deposition of Ti-Al-N: Influencing the Cubic to Wurtzite phase transition, L. Zauner (Poster)